Faculty Information

Specialization and related fields

Business career

Belonging society

Winning science prize

Official position and committee in Univ.

Committee and society

Book and thesis

Lecturer and lecture

Academic conference presentation

（Last updated : 2023-09-29 17:44:09）

SHIGESATO Yuuzou
Department Aoyama Gakuin University Department of Chemistry and Biological Science, College of Science and Engineering

Position Professor

■ Specialization and related fields

Inorganic/coordination chemistry, Applied condensed matter physics, Semiconductors, optical properties of condensed matter and atomic physics, Fundamental plasma, Thin film/surface and interfacial physical properties

■ Business career

1.	1997/04～2001/03	Aoyama Gakuin University College of Science and Engineering
2.	2001/04～2004/03	Aoyama Gakuin University College of Science and Engineering Professor
3.	2004/04～	Aoyama Gakuin University College of Science and Engineering Department of Chemistry and Biological Science Professor

■ Belonging society

1995～

Materials Research Society

■ Winning science prize

1.	2011/03	Best Poster Award(Silcver): 7th International Symposium on Tr (...) (High Rate Deposition of Ta-doped SnO2(TTO) by Reactive Sputtering with Plasma Emission Intesity or Impedance Feedback systems)
2.	2012/06	Poster Award 3rd Prize:9th International Conference on Coatings on Glass and Pla (...) (Electrochromic WO3 Films Deposited by Hollow Cathode Gas Flow Sputtering with Very High Deposition Rate)
3.	2013/09	Best Poster Award:2013-JSAP-MRS Joint Symposia, 2013.9.17-19, (...) (In-free Transparent Conductive Films Deposited by Reactive Sputtering with a Sintered Metal Powder Target using Ne, Ar or Kr)
4.	2013/09	Best Poster Award:2013-JSAP-MRS Joint Symposia, 2013.9.17-19, Doshisha Uni (...) (The study on crystal growth of TiO2 films deposited by reactive sputtering)
5.	2014/12	Award for Encouragement of Research in The 1st E-MRS/MRS-J Bilateral Symposia:The materials (...) (Temperature Dependence of Phonon or Free Electron Contributions on Thermal Conductivity of VO2 Thin Films across Metal-Insulator Transition)
6.	2015/07	Best Poster Award,The 13th International Symposium on Sputtering & Plasma Processes(ISSP2015) (Study on the crystallization of amorphous IGZO thin films deposited by dc magnetron sputtering)
7.	2015/08	Journal of Materials Research(JMR) Paper of the Year Award (Termophysical properties of SnO2-based transparent conductive films: Effect of dopant species and structure compared with In2O3-, ZnO-, and TiO2-based films)
8.	2015/10	The 9th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics(TOEO-9) Best Poster Award, TOEO-9 (Sn-doping Induced Structural Changes for Sputtered TiO2 Films)
9.	2016/05	European Materials Research Society(E-MRS) 2016 Spring Meeting 1st Poster Award,E-MRS 2016 Spring Meeting (In-situ Brouwer analysis on defects in homologous In O (ZnO) films)
10.	2016/05	European Materials Research Society(E-MRS) 2016 Spring Meeting 2nd Poster Award, E-MRS 2016 Spring Meeting (Deposition of indium-oxide based transparent conductive films by reactive sputtering using alloy targets)
Display 5 items
Display all(10)

■ Official position and committee in Univ.

1.	2005/04/01～2007/03/31	Aoyama Gakuin University Curriculum Coordinator
2.	2007/04/01～2009/03/31	Aoyama Gakuin University Curriculum Coordinator

■ Committee and society

1.	2023/07/01～	president
2.	2014/09/01～	E-MRS & MRS-J Bilateral Symposium

■ Book and thesis

1.	Article	Structural, optical and electrical properties of ZnO–InN quaternary compound films Thin Solid Films 780,pp.139961 (Collaboration) 2023
2.	Article	Amorphous In-Ga-Mg-O thin films formed by rf magnetron sputtering: optical, electrical properties and thin-film-transistor characteristics IEEE Open Journal of Nanotechnology 3,pp.149-152 (Collaboration) 2022/11
3.	Article	Thermal conductivity across the van der Waals layers of α-MoO3 thin films composed of mosaic domains with in-plane 90° rotations Journal of Applied Physics 130,pp.085103-1-085103-7 (Collaboration) 2021/08
4.	Article	How mass disorder affects heat conduction in ternary amorphous alloys AIP Advances 11,pp.065026-1-065026-7 (Collaboration) 2021/06
5.	Article	Temporal Evolution of Microscopic Structure and Functionality during Crystallization of Amorphous Indium-Based Oxide Films ACS Appl. Mater. Interfaces 13(27),pp.31825-31834 (Collaboration) 2021/06
6.	Article	p-type conduction mechanism in continuously varied non-stoichimetric SnOx thin films deposited by reactive sputtering with the impedance control Journal of Applied Physics 127,pp.185703 (Collaboration) 2020/05
7.	Article	Evolution of Defect Structures and Deep Subgap States during Annealing of Amorphous In-Ga-Zn Oxide for Thin-Film Transistors PHYSICAL REVIEW APPLIED 9(1),pp.014018 (Collaboration) 2018/01
8.	Article	isible-light Active TiO₂ Photocatalyst by Multilayered with WO₃ Film Phys.Chem.Chem.Phys. 19,pp.17342-17348 (Collaboration) 2017/06
9.	Article	Structure and thermophysical properties of GaN films deposited by reactive sputtering using a metal Ga target Journal of Vacuum Science & Technology A 35(4),pp.041507 1-041507 7 (Collaboration) 2017/06
10.	Article	Indium oxide-based transparent conductive films deposited by reactive sputtering using alloy targets Japanese Journal or Applied Physics 56(4),pp.045503 1-045503 7 (Collaboration) 2017/03
11.	Article	On the Crystal Structural Control of Sputtered TiO₂ Thin Films Nanoscale Research Letters 11,pp.324 (Collaboration) 2016/12
12.	Article	Influence of dopant species and concentration on grain boundary scattering in degenerately doped In₂O₃ thin films Thin Solid Films 614(part B),pp.62-68 (Collaboration) 2016/09
13.	Article	Formation of homologous In₂O₃(ZnO)(m) thin films and its thermoelectric properties Journal of Vacuum Science & Technology A (Collaboration) 2016/06
14.	Article	omparative study of sputter-deposited SnO₂ films doped with antimony or tantalum physica status solidi (b) 253(5),pp.923-928 (Collaboration) 2016/05
15.	Article	Crystallization behavior of amorphous indium-gallium-zinc oxide films and its effect on thin-film transistor performance Japanese Journal of Applied Physics 55(3),pp.035004 1-035004 5 (Collaboration) 2016/02
16.	Article	Crystallization behavior during transparent In₂O₃-ZnO film growth physica status solidi (a) 213(9),pp.2291-2295 (Collaboration) 2016/01
17.	Article	Tailoring the crystal structure of TiO₂ thin films from the anatase to rutile phase pp.041505 (Collaboration) 2015/05
18.	Article	Temperature dependence of thermal conductivity of VO₂ thin films across metal-insulator transition pp.053201 (Collaboration) 2015/04
19.	Article	Tuning hole charge collection efficiency in polymer photovoltaics by optimizing the work function of indium tin oxide electrodes with solution-processed LiF nanoparticles 26,pp.9205 (Collaboration) 2015
20.	Article	Visible-light active thin-film WO₃ photocatalyst with controlled high-rate deposition by low-damage reactive-gas-flow sputtering 3,pp.104407 (Collaboration) 2015
21.	Article	Origin of carrier scattering in polycrystalline Al-doped ZnO films pp.105802 (Collaboration) 2014/09
22.	Article	Al-doped ZnO films deposited on a slightly reduced buffer layer by reactive dc unbalanced magnetron sputtering (555),pp.93-99 (Collaboration) 2014
23.	Article	Study on reactive sputtering to deposit transparent conductive amorphous In₂O₃-ZnO films using an In-Zn alloy target (559),pp.49-52 (Collaboration) 2014
24.	Article	Thermophysical Properties of SnO2-based Transparent Conductive Film: Effect of Dopant Species and Structures, Compared sith In₂O₃-, ZnO-, TiO₂-based Films pp.1579-1584 (Collaboration) 2014
25.	Article	Transparent conductive Al or Ga doped ZnO films deposited by off-axis sputtering (559),pp.69-77 (Collaboration) 2014
26.	Article	Transparent conductive Nb-doped TiO₂ films deposited by reactive dc sputtering using Ti-Nb alloy target, precisely controlled the transition region using impedance feedback system (301),pp.551-556 (Collaboration) 2014
27.	Article	Work function tuning of tin-doped indium oxide electrodes with solution-processed lithium fluoride (559),pp.58-63 (Collaboration) 2014
28.	Article	Reactive Gas-Flow-Sputter Deposition of Amorphous WO₃ Films for Electrochromic devices Thin Solid Films pp.1-6 (Collaboration) 2013/04
29.	Article	Direct observation of the band gap shrinkage in amorphous In₂O₃–ZnO thin films (113),pp.163702 (Collaboration) 2013
30.	Article	In situ analyses on negative ions in the indium-gallium-zinc oxide sputtering process (103),pp.13501 (Collaboration) 2013
31.	Article	Electrochromic properties of nickel oxide based thin films sputter deposited in the presence of water vapor Thin Solid Films pp.3839-3842 (Collaboration) 2012
32.	Article	Electronic state of amorphous indium gallium zinc oxide films deposited by dc magnetron sputtering with water vapor introduction Appl. Phys. Express pp.075802 (Collaboration) 2012
33.	Article	Experimental observation on the Fermi level shift in polycrystalline Al-doped ZnO films J. Appl. Phys. pp.013718 (Collaboration) 2012
34.	Article	High-rate deposition of High-quality Sn-doped In₂O₃ films by reactive magnetron sputtering using alloy targets Thin Solid Films pp.4101 (Collaboration) 2012
35.	Article	High-rate deposition of Ta-doped SnO₂ films by reactive magnetron sputtering using a Sn-Ta metal-sintered target Thin Solid Films pp.3746 (Collaboration) 2012
36.	Article	In-situ analyses on the reactive sputtering process to deposit Al doped ZnO films using an Al-Zn alloy target Thin Solid Films pp.3751 (Collaboration) 2012
37.	Article	Photocatalytic Activity of WO₃ Films Crystallized by Postannealing in Air Jpn. J. Appl. Phys. pp.055501-1-5 (Collaboration) 2012
38.	Article	Termophysical properties of transparent conductive Nb-doped TiO₂ films Jpn. J. Appl. Phys. pp.035802 (Collaboration) 2012
39.	Article	Thermophysical and electrical properties of Al-doped ZnO films J. Appl. Phys. pp.093701 (Collaboration) 2012
40.	Article	Visible light-induced photocatalytic properties of WO₃ films deposited by dc reactive magnetron sputtering J. Vac. Sci. Technol. A pp.031503-1-5 (Collaboration) 2012
41.	Article	Visible-light active photocatalytic WO₃ films loaded with Pt nanoparticles deposited by sputtering J. Nanosci. Nanotechnol pp.5082-5086 (Collaboration) 2012
42.	Article	Effect of Oxygen Impurity on Thermal Diffusivity of AlN Thin Films Deposited by Reactive rf Magnetron Sputtering Jpn. J. Appl. Phys. pp.11RB01 (Collaboration) 2011
43.	Article	High Rate Reactive Sputter Deposition of TiO₂ Films for Photocatalyst and Dye-Sensitized Solar Cells Jpn. J. Appl. Phys. pp.045802 (Collaboration) 2011
44.	Article	High-rate deposition of Sb-doped SnO₂ films by reactive sputtering using the impedance control method Thin Solid Films pp.1178-1181 (Collaboration) 2011
45.	Article	In-situ analysis of positive and negative energetic ions generated during Sn-doped In₂O₃ deposition by reactive sputtering Thin Solid Films pp.1182-1185 (Collaboration) 2011
46.	Article	Oxidation Resistance of Ti-Si-N and Ti-Al-Si-N Films Deposited by Reactive Sputtering Using Alloy Targets Jpn. J. Appl. Phys. pp.075802 (Collaboration) 2011
47.	Article	Termal Boundary Resistance between N,N'-Bis(1-naphthyl)-N,N'-Diphenylbenzidine and Aluminum Films Jpn. J. Appl. Phys. pp.11RB02 (Collaboration) 2011
Display 5 items
Display all(47)

■ Lecturer and lecture

1.	2022/10/16	Deposition of functional oxide films by Reactive Sputtering; Various TCO’s, photocatalyst and optical films (Hersonissos, Greece,)
2.	2022/10/16	Modelling structural evolution of In2O3-based amorphous films during annealing (Hersonissos, Greece)
3.	2021/12/16	Thermal Transport Character of Hetero-Epitaxial Metal Oxides Thin Film and Thermophysical Property Database for Nanomaterial (Yokohama)
4.	2021/10/20	IGZO TFTs: from deposition process (オンライン)
5.	2021/09/02	Deposition of various TCO’s and the functional oxide films by dc reactive sputtering; (1) with plasma-emission or impedance feedback systems, (2) hollow cathode gas flow sputtering (オンライン)
6.	2018/07/29	Thin Film Photocatalysts sith Visible-Light Activities Deposited by Magnetron Sputtering (Hefei,Anhui (China))
7.	2018/06/10	Phonon Engineering on In₂O₃-and ZnO-based Thin Films (Perugia(Italy))
8.	2017/08/27	Thermophysical Properties of Transparent Conductive Oxide Thin Films (Kyoto University, Kyoto, Japan)
9.	2017/07/03	Reactive sputter depositions of various TCO films with the low resistivity (Waseda University, Tokyo, Japan)
10.	2017/06/18	Reactive sputter depositions of various TCOs, photocatalysts and thermochromic films (Padua (Italy))
11.	2017/02/08	「スマートウィンドウ技術」 (日本ファインセラミックス協会（東京都）)
12.	2016/09/12	Reactive sputter deposition of functional oxide films with various performances (Garmisch-Partenkirchen（Germany))
Display 5 items
Display all(12)

■ Academic conference presentation

1.	2022/09/26	Contribution of free electrons to thermal conductivity changes for Pd-catalyzed Mg-Ni alloy films by the hydrogenation (The 13th Asian Thermophysical Properties Conference (ATPC 2022))
2.	2022/09/26	Electrical and thermal character changes for Gd thin film by Gaschromic method using a H2/Ar mixed Gas. (The 13th Asian Thermophysical Properties Conference (ATPC 2022))
3.	2022/09/26	Heat transport properties for amorphous and polycrystalline WO3 films (The 13th Asian Thermophysical Properties Conference (ATPC 2022))
4.	2022/09/26	Study on the Zn-In-O-N films deposited by sputtering (The 13th Asian Thermophysical Properties Conference (ATPC 2022))
5.	2022/09/26	The effect of film structure on the thermal conductivity for Al2O3 thin films prepared by sputtering method (The 13th Asian Thermophysical Properties Conference (ATPC 2022))
6.	2022/09/26	Thermal and structural characters for Y-Mg alloys thin film in hydrogenation and dehydrogenation states (The 13th Asian Thermophysical Properties Conference (ATPC 2022))
7.	2021/12/16	Characteristic Modification of TCO thin films by Flash Lamp Irradiation (Materials Research Meeting 2021)
8.	2021/12/14	All-solid-state electrochromic devices using switchable mirror films (Materials Research Meeting 2021)
9.	2021/12/14	Crystallization of In2O3-based amorphous thin films and its influence on electrical properties (Materials Research Meeting 2021)
10.	2021/12/14	Density and thermal conductivity of amorphous Al2O3 films deposited by rf magnetron sputtering under the total gas pressure from 0.5 to 8.0 Pa (Materials Research Meeting 2021)
11.	2021/12/14	Development of flexible photocatalytic sheet with the retentional photo-induced hydrophilicity (Materials Research Meeting 2021)
12.	2021/12/14	Electrical and thermal conductivity changes of hydro- and dehydrogenated Y-Mg alloy thin film controlled by 3% H2 in Ar gas (Materials Research Meeting 2021)
13.	2021/12/14	Gas sensing properties of SnO2 films deposited by rf magnetron sputtering (Materials Research Meeting 2021)
14.	2021/12/14	Modal analysis of spectral thermal conductivity of amorphous oxide alloys (Materials Research Meeting 2021)
15.	2021/12/14	n-type and p-type SnOx thin films deposited by reactive sputtering (Materials Research Meeting 2021)
16.	2021/12/14	Preparation of Pd-catalyzed Mg-Ni films and thermal conductivity changes by the hydrogenation using Ar-H2 gas (Materials Research Meeting 2021)
17.	2021/12/14	Structural Control and Characterization of Molybdenum oxide thin films by post-treatment processes (Materials Research Meeting 2021)
18.	2021/12/14	Thermal Conductivity Changes of Gd-Based Thin Films by Electrochemical Hydrogenation/Dehydrogenation (Materials Research Meeting 2021)
19.	2021/12/14	Thermal conductivity of amorphous and polycrystalline WO3 films (Materials Research Meeting 2021)
20.	2021/12/14	Transparent Thin Film Heaters For Anti-fogging Window Applications (Materials Research Meeting 2021)
21.	2018/10/21	Control on the interface between thin film TiO₂ photocatalyst and PET, PI substrates (ACSIN-14& ICSPM26)
22.	2018/10/21	IrO_x based Electrochromic films deposited by rf suputtering (ACSIN-14& ICSPM26)
23.	2018/10/21	Switchable mirror materials based on Gd-Mg alloy deposited by sputtering (ACSIN-14& ICSPM26)
24.	2018/10/14	Effects of the Al doping on thermal conductivity for heteroepitaxially grown Al-doped ZnO films (7th International Symposium on Transparent Conductive Materials (IS-TCMs))
25.	2018/10/14	Local structure of Nb and/or N doped TiO₂ film formed by reactive sputtering (7th International Symposium on Transparent Conductive Materials (IS-TCMs))
26.	2018/10/14	Optical properties of niobium oxide films deposited by reactive sputtering with the plasma emission feedback system (7th International Symposium on Transparent Conductive Materials (IS-TCMs))
27.	2018/07/29	High Quality TiO₂ Photocatalyst Deposited on PET or PI Polymer Films by Reactive Sputtering for Flexible Photocatalytic Sheet (The 22nd International Conference on Photochemical Conversion and Storage of Solar Energy (IPS-22))
28.	2018/04/02	Fabrication of p-type SnO_x Thin Films and its Defect Structure (MRS Spring Meeting 2018)
29.	2017/11/26	Experimental Investigation on Structural Evolution of Amorphous Indium-Based Oxide Films During Annealing by In Situ XRD and EXAFS Measurements (2017MRS Fall Meeting & Exhibit)
30.	2017/11/26	Structural Characterization of Functional ZnO-InN Alloy Films (2017MRS Fall Meeting & Exhibit)
31.	2017/11/26	Structural, Optical and Electrical Properties of Zn₃N₂ Films Deposited by dc or rf Magnetron Sputtering (2017MRS Fall Meeting & Exhibit)
32.	2017/10/01	Electrochromic WO₃ Films with controlled high-rate deposition by Hollow Cathode Gas Flow Sputtering (The 232nd Electrochemical Society (ECS) MEETING)
33.	2017/09/03	Thermal Conductivity of Epitaxial VO₂ Film at The Metal-Insulator Phase Transition (European Conference on Thermophysical Properties (ECTP 21st 2017))
34.	2017/08/27	Characterization of heteroepitaxial grown ITO films deposited by sputtering (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
35.	2017/08/27	Characterization of Layered In₂O₃(ZnO)_m Films (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
36.	2017/08/27	Characterization of Si or Ti-doped diamond-like carbon films (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
37.	2017/08/27	Crystal structure control of TiO₂ films deposited by reactive sputtering (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
38.	2017/08/27	Deposition of Niobium Oxide films by reactive sputtering with the plasma emission monitoring system (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
39.	2017/08/27	Dielectricconstant and work function of tungsten oxide (WO_3-x) films (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
40.	2017/08/27	Electrical and thermal conductivity change for epitaxial VO₂ film at the metal-insulator phase transition (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
41.	2017/08/27	Experimental investigation on crystallization of In₂O₃ based amorphous transparent conductive oxide films (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
42.	2017/08/27	Fabrication of graphene and molybdenum oxide hybrid films for transparent conductive films (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
43.	2017/08/27	Gd and Mg-Y switching mirror materials deposited by sputtering (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
44.	2017/08/27	Optical, electrical, and thermophysical properties of heteroepitaxial grown Al-doped ZnO (AZO)” K. Honda (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
45.	2017/08/27	Phase Stability of Sn doped TiO₂ studied by X-ray Absorption Spectroscopy and First-Principles DFT Calculations (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
46.	2017/08/27	Photocatalytic TiO₂ films deposited on flexible polymer substrates by reactive sputtering (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
47.	2017/08/27	Reactive sputter deposition of n-type and p-type SnO_x films (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
48.	2017/08/27	Reactive sputter deposition of Nb-doped TiO₂ films using Ni-Ti alloy target with impedance control systems (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
49.	2017/08/27	Structural characterization of GaN films deposited by rf sputtering using He, Ne, Ar, and Kr as sputtering gases (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
50.	2017/08/27	Study on the Zn-In-O-N(SION) films deposited by dc or rf sputtering (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
51.	2017/08/27	Tailoring Crystal Structural of Sputtered TiO₂ Film by Impurity Doping (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
52.	2017/08/27	Thermal conductivity of Ti-doped diamond-like carbon thin fims (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
53.	2017/08/27	Zn₃N₂ films deposited by dc or rf magnetron sputtering (IUMRS-ICAM 2017 Symposium B-1 (3rd Bilateral MRS-J / E-MRS symposium))
54.	2017/07/03	Dielectric function of Nb-TiO₂ and TiO_2-x films by reactive sputtering (10th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics(TOEO-10))
55.	2017/07/03	n-type and p-type SnO_x films deposited by reactive sputtering with the impedance control system (10th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics(TOEO-10))
56.	2017/07/03	Niobium Oxide films with precisely controlled various stoichiometry deposited by reactive sputtering with the plasma emission monitoring system (10th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics(TOEO-10))
57.	2017/07/03	Structural, optical and electrical properties of sputtered (ZnO) _x (InN)_1−x Films (10th International Symposium on Transparent Oxide and Related Materials for Electronics and Optics(TOEO-10))
58.	2017/04/17	Thermal conduction in homologous In₂O₃(ZnO)_m films (2017 MRS Spring Meeting & Exhibit)
59.	2017/04/17	Thermal conductivities of epitaxial Al-doped and ZnO thin films deposited by magnetron sputtering (2017 MRS Spring Meeting & Exhibit)
60.	2017/04/17	TiO₂ Film as Visible-Light Active Photocatalyst by Designing the Multilayer Structure with WO₃ Film (2017 MRS Spring Meeting & Exhibit)
61.	2016/12/19	Deposition of Niobium Oxide films by reactive sputtering with the plasma emission feedback system in the transition region (26th Annual Meeting of MRS-Japan 2016 (MRS-J))
62.	2016/12/19	High rate diposition of n-type and p-type SnOx films deposited by reactive magnetron sputtering with unipolar pulsing and impedance control system (26th Annual Meeting of MRS-Japan 2016 (MRS-J))
63.	2016/12/19	Selective deposition of polycrystalline anatase TiO₂ films by reactive sputtering with Nb or N dopings (26th Annual Meeting of MRS-Japan 2016 (MRS-J))
64.	2016/12/19	Selective deposition of polycrystalline rutile TiO₂ films by reactive sputtering with controlling deposition parameters or Sn-doping (26th Annual Meeting of MRS-Japan 2016 (MRS-J))
65.	2016/12/19	Study on ZnO-InN(ZnInON) films as the functional oxynitride materials (26th Annual Meeting of MRS-Japan 2016 (MRS-J))
66.	2016/12/19	Synthesis of Zn₃N₂ fils by DC and RF magnetron sputtering (26th Annual Meeting of MRS-Japan 2016 (MRS-J))
67.	2016/11/27	Thin-Film WO₃ Photocatalyst with Visible Light Activity; (1) Deposition by the conventional reactive sputtering (2016 MRS Fall Meeting & Exhibit)
68.	2016/11/27	Thin-Film WO₃ Photocatalyst with Visible Light Activity; (2) Deposition by the hollow cathode gas flow sputtering (2016 MRS Fall Meeting & Exhibit)
69.	2016/09/12	Visible-light active thin-film WO₃ photocatalyst deposited by low-damage hollow-cathode reactive-gas-flow sputtering (15th International Conference on Plasma Surface Engineering (PSE2016))
70.	2016/05/02	Deposition of indium-oxide based transparent conductive films by reactive sputtering using alloy targets (European Materials Research Society(E-MRS) 2016 Spring Meeting)
71.	2016/05/02	Effect of V and Ga dopant on the structural and electrical properties of ZnO films (European Materials Research Society(E-MRS) 2016 Spring Meeting)
72.	2016/05/02	In-situ Brouwer analysis on defects in homologous In₂O₃(ZnO) films (European Materials Research Society(E-MRS) 2016 Spring Meeting)
73.	2016/05/02	Pt-loaded WO₃ photocatalyst with visible light activity deposited hollow-cathode reactive gas-flow sputtering (European Materials Research Society(E-MRS) 2016 Spring Meeting)
74.	2016/05/02	Thermal conductivity of polycrystalline VO₂ thin films across Metal-Insulator Transition (E)
Display 5 items
Display all(74)