Department   Aoyama Gakuin University  Department of Chemistry and Biological Science, College of Science and Engineering
   Position   Professor
Language English
Publication Date 2017/06
Type Academic Journal
Peer Review Peer reviewed
Title Structure and thermophysical properties of GaN films deposited by reactive sputtering using a metal Ga target
Contribution Type Collaboration
Journal Journal of Vacuum Science & Technology A
Journal TypeAnother Country
Publisher AIP Publishing
Volume, Issue, Page 35(4),pp.041507 1-041507 7
Author and coauthor Y. Isosaki, Y. Yamashita and T. Yagi, J. Jia, N. Taketoshi, S. Nakamura, Y. Shigesato