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SHIGESATO Yuuzou
Department Aoyama Gakuin University Department of Chemistry and Biological Science, College of Science and Engineering Position Professor |
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| Language | English |
| Publication Date | 2017/06 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Structure and thermophysical properties of GaN films deposited by reactive sputtering using a metal Ga target |
| Contribution Type | Collaboration |
| Journal | Journal of Vacuum Science & Technology A |
| Journal Type | Another Country |
| Publisher | AIP Publishing |
| Volume, Issue, Page | 35(4),pp.041507 1-041507 7 |
| Author and coauthor | Y. Isosaki, Y. Yamashita and T. Yagi, J. Jia, N. Taketoshi, S. Nakamura, Y. Shigesato |