SHIGESATO Yuuzou
Department Aoyama Gakuin University Department of Chemistry and Biological Science, College of Science and Engineering Position Professor |
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Language | English |
Publication Date | 2014 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Study on reactive sputtering to deposit transparent conductive amorphous In2O3-ZnO films using an In-Zn alloy target |
Contribution Type | Collaboration |
Volume, Issue, Page | (559),pp.49-52 |
Author and coauthor | Naoki Tsukamoto, Sakae Sensui, Junjun Jia, Nobuto Oka, Yuzo Shigesato* |