Department   Aoyama Gakuin University  Department of Chemistry and Biological Science, College of Science and Engineering
   Position   Professor
Language English
Publication Date 2014
Type Academic Journal
Peer Review Peer reviewed
Title Study on reactive sputtering to deposit transparent conductive amorphous In2O3-ZnO films using an In-Zn alloy target
Contribution Type Collaboration
Volume, Issue, Page (559),pp.49-52
Author and coauthor Naoki Tsukamoto, Sakae Sensui, Junjun Jia, Nobuto Oka, Yuzo Shigesato*