SHIGESATO Yuuzou
Department Aoyama Gakuin University Department of Chemistry and Biological Science, College of Science and Engineering Position Professor |
|
Language | English |
Publication Date | 2013 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | In situ analyses on negative ions in the indium-gallium-zinc oxide sputtering process |
Contribution Type | Collaboration |
Volume, Issue, Page | (103),pp.13501 |
Author and coauthor | Junjun Jia, Yoshifumi Torigoshi, Yuzo Shigesato* |