Department   Aoyama Gakuin University  Department of Chemistry and Biological Science, College of Science and Engineering
   Position   Professor
Language English
Publication Date 2013
Type Academic Journal
Peer Review Peer reviewed
Title In situ analyses on negative ions in the indium-gallium-zinc oxide sputtering process
Contribution Type Collaboration
Volume, Issue, Page (103),pp.13501
Author and coauthor Junjun Jia, Yoshifumi Torigoshi, Yuzo Shigesato*