SHIGESATO Yuuzou
Department Aoyama Gakuin University Department of Chemistry and Biological Science, College of Science and Engineering Position Professor |
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Language | Japanese |
Publication Date | 2012 |
Type | Academic Journal |
Title | Electronic state of amorphous indium gallium zinc oxide films deposited by dc magnetron sputtering with water vapor introduction |
Contribution Type | Collaboration |
Journal | Appl. Phys. Express |
Volume, Issue, Page | pp.075802 |