Department   Aoyama Gakuin University  Department of Chemistry and Biological Science, College of Science and Engineering
   Position   Professor
Language Japanese
Publication Date 2012
Type Academic Journal
Peer Review Peer reviewed
Title High-rate deposition of High-quality Sn-doped In2O3 films by reactive magnetron sputtering using alloy targets
Contribution Type Collaboration
Journal Thin Solid Films
Volume, Issue, Page pp.4101