Department   Aoyama Gakuin University  Department of Chemistry and Biological Science, College of Science and Engineering
   Position   Professor
Language Japanese
Publication Date 2012
Type Academic Journal
Peer Review Peer reviewed
Title High-rate deposition of Ta-doped SnO2 films by reactive magnetron sputtering using a Sn-Ta metal-sintered target
Contribution Type Collaboration
Journal Thin Solid Films
Volume, Issue, Page pp.3746