Department   Aoyama Gakuin University  Department of Chemistry and Biological Science, College of Science and Engineering
   Position   Professor
Language Japanese
Publication Date 2012
Type Academic Journal
Peer Review Peer reviewed
Title In-situ analyses on the reactive sputtering process to deposit Al doped ZnO films using an Al-Zn alloy target
Contribution Type Collaboration
Journal Thin Solid Films
Volume, Issue, Page pp.3751