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SHIGESATO Yuuzou
Department Aoyama Gakuin University Department of Chemistry and Biological Science, College of Science and Engineering Position Professor |
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| Language | Japanese |
| Publication Date | 2011 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Oxidation Resistance of Ti-Si-N and Ti-Al-Si-N Films Deposited by Reactive Sputtering Using Alloy Targets |
| Contribution Type | Collaboration |
| Journal | Jpn. J. Appl. Phys. |
| Volume, Issue, Page | pp.075802 |