Department   Aoyama Gakuin University  Department of Chemistry and Biological Science, College of Science and Engineering
   Position   Professor
Language Japanese
Publication Date 2011
Type Academic Journal
Peer Review Peer reviewed
Title Oxidation Resistance of Ti-Si-N and Ti-Al-Si-N Films Deposited by Reactive Sputtering Using Alloy Targets
Contribution Type Collaboration
Journal Jpn. J. Appl. Phys.
Volume, Issue, Page pp.075802