Department   Aoyama Gakuin University  Department of Chemistry and Biological Science, College of Science and Engineering
   Position   Professor
Language Japanese
Publication Date 2011
Type Academic Journal
Peer Review Peer reviewed
Title In-situ analysis of positive and negative energetic ions generated during Sn-doped In2O3 deposition by reactive sputtering
Contribution Type Collaboration
Journal Thin Solid Films
Volume, Issue, Page pp.1182-1185