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SHIGESATO Yuuzou
Department Aoyama Gakuin University Department of Chemistry and Biological Science, College of Science and Engineering Position Professor |
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| Language | Japanese |
| Publication Date | 2011 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | In-situ analysis of positive and negative energetic ions generated during Sn-doped In2O3 deposition by reactive sputtering |
| Contribution Type | Collaboration |
| Journal | Thin Solid Films |
| Volume, Issue, Page | pp.1182-1185 |