|
SHIGESATO Yuuzou
Department Aoyama Gakuin University Department of Chemistry and Biological Science, College of Science and Engineering Position Professor |
|
| Language | Japanese |
| Publication Date | 2011 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | High-rate deposition of Sb-doped SnO2 films by reactive sputtering using the impedance control method |
| Contribution Type | Collaboration |
| Journal | Thin Solid Films |
| Volume, Issue, Page | pp.1178-1181 |