ISHIKAWA Yasuaki
   Department   Aoyama Gakuin University  Department of Electrical Engineering and Electronics, College of Science and Engineering
   Position   Professor
Language English
Publication Date 2013/09
Type Academic Journal
Peer Review Peer reviewed
Title Characterization of Al2O3 gate dielectric deposited on n-GaN by plasma-assisted atomic layer deposition
Contribution Type Collaboration
Journal Physica Status Solidi C
Journal TypeAnother Country
Volume, Issue, Page 10,pp.1426-1429
Author and coauthor Koji Yoshitsugu, Masahiro Horita, Yasuaki Ishikawa, and Yukiharu Uraoka
DOI 10.1002/pssc.201300273