ISHIKAWA Yasuaki
   Department   Aoyama Gakuin University  Department of Electrical Engineering and Electronics, College of Science and Engineering
   Position   Professor
Language English
Publication Date 2020/02
Type Academic Journal
Peer Review Peer reviewed
Title Highly-reliable amorphous InGaZnO with atomic layer deposited Al2O3 passivation using dimethylaluminum hydride at 200oC
Contribution Type Collaboration
Journal J. Phys. D: Appl. Phys.
Journal TypeAnother Country
Volume, Issue, Page 53,pp.165103-1-10
Author and coauthor Dianne Corsino, Juan Paolo Bermundo, Mami Fujii, Kiyoshi Takahashi, Yasuaki Ishikawa, and Yukiharu Uraoka,
DOI 10.1088/1361-6463/ab6e97