ISHIKAWA Yasuaki
   Department   Aoyama Gakuin University  Department of Electrical Engineering and Electronics, College of Science and Engineering
   Position   Professor
Language English
Publication Date 2019/05
Type Academic Journal
Peer Review Peer reviewed
Title Removing Process of the Three-Dimension Periodic Nanostructure Fabricated from KMPR Photoresist
Contribution Type Collaboration
Journal Jpn. J. Appl. Phys.
Journal TypeAnother Country
Volume, Issue, Page 58,pp.SDDF08-1-7
Author and coauthor Xudongfang Wang, Yasuaki Ishikawa, Shinji Araki, Mutsunori Uenuma, and Yukiharu Uraoka
DOI 10.7567/1347-4065/ab0dea