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KOH Shinji
Department Aoyama Gakuin University Department of Electrical Engineering and Electronics, College of Science and Engineering Position Professor |
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| Language | English |
| Publication Date | 2002/01 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Surface Smoothing of SiGe Strain-Relaxed Buffer Layers by Chemical Mechanical Polishing |
| Contribution Type | Collaboration |
| Journal | Materials Science & Engineering B |
| Journal Type | Another Country |
| Volume, Issue, Page | 89,pp.406-409 |
| Author and coauthor | K. Sawano, K. Kawaguchi, T. Ueno, S. Koh, K. Nakagawa, and Y. Shiraki |