KOH Shinji
   Department   Aoyama Gakuin University  Department of Electrical Engineering and Electronics, College of Science and Engineering
   Position   Professor
Language English
Publication Date 2002/01
Type Academic Journal
Peer Review Peer reviewed
Title Mobility Enhancement in Strained Si Modulation-Doped Structures by Chemical Mechanical Polishing
Contribution Type Collaboration
Journal Applied Physics Letters
Journal TypeAnother Country
Volume, Issue, Page 82,pp.412-414
Author and coauthor K. Sawano, S. Koh, Y. Shiraki, Y. Hirose, T. Hattori, and K. Nakagawa