KOH Shinji
Department Aoyama Gakuin University Department of Electrical Engineering and Electronics, College of Science and Engineering Position Professor |
|
Language | English |
Publication Date | 2003/04 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Planarization of SiGe Virtual Substrates by CMP and its Application to Strained Si Modulation-Doped Structures |
Contribution Type | Collaboration |
Journal | Journal of Crystal Growth |
Journal Type | Another Country |
Volume, Issue, Page | 251,pp.693-696 |
Author and coauthor | K. Sawano, K. Arimoto, Y. Hirose, S. Koh, N. Usami, K. Nakagawa, T. Hattori, and Y. Shiraki |