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KOH Shinji
Department Aoyama Gakuin University Department of Electrical Engineering and Electronics, College of Science and Engineering Position Professor |
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| Language | English |
| Publication Date | 2003/05 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Surface Planarization of Strain-Relaxed SiGe Buffer Layers by CMP and Post Cleaning |
| Contribution Type | Collaboration |
| Journal | Journal of Electrochemical Society |
| Journal Type | Another Country |
| Volume, Issue, Page | 150,pp.G376-G379 |
| Author and coauthor | K. Sawano, K. Kawaguchi, S. Koh, Y. Hirose, K. Nakagawa, T. Hattori, and Y. Shiraki |