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KOH Shinji
Department Aoyama Gakuin University Department of Electrical Engineering and Electronics, College of Science and Engineering Position Professor |
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| Language | English |
| Publication Date | 2004/03 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Formation of thin SiGe virtual substrates by ion implantation into Si substrates |
| Contribution Type | Collaboration |
| Journal | applied Surface Science |
| Journal Type | Another Country |
| Volume, Issue, Page | 224,pp.99-103 |
| Author and coauthor | K. Sawano, S. Koh, Y. Hirose, T. Hattori, K. Nakagawa, and Y. Shiraki |