KOH Shinji
   Department   Aoyama Gakuin University  Department of Electrical Engineering and Electronics, College of Science and Engineering
   Position   Professor
Language English
Publication Date 2004/07
Type Academic Journal
Peer Review Peer reviewed
Title Fabrication of high-quality strain-relaxed thin SiGe layers by ion- implanted Si substrates
Contribution Type Collaboration
Journal Applied Physics Letters
Journal TypeAnother Country
Volume, Issue, Page 85,pp.2514-2516
Author and coauthor K. Sawano, S. Koh, Y. Shiraki, Y. Ozawa, T. Hattori, J. Yamanaka, K. Suzuki, K. Arimoto, K. Nakagawa and N. Usami