KOH Shinji
Department Aoyama Gakuin University Department of Electrical Engineering and Electronics, College of Science and Engineering Position Professor |
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Language | English |
Publication Date | 2004/10 |
Type | Academic Journal |
Peer Review | Peer reviewed |
Title | Observation of dislocations in strain-relaxed silicon-germanium thin films with flat surfaces grown on ion-implanted silicon substrates |
Contribution Type | Collaboration |
Journal | Material Science in Semiconductor Processing |
Journal Type | Another Country |
Volume, Issue, Page | 7,pp.289-292 |
Author and coauthor | J. Yamanaka, K. Sawano, K. Nakagawa, K. Suzuki, Y. Ozawa, S. Koh, T. Hattori and Y. Shiraki |