KOH Shinji
   Department   Aoyama Gakuin University  Department of Electrical Engineering and Electronics, College of Science and Engineering
   Position   Professor
Language English
Publication Date 2004/10
Type Academic Journal
Peer Review Peer reviewed
Title Observation of dislocations in strain-relaxed silicon-germanium thin films with flat surfaces grown on ion-implanted silicon substrates
Contribution Type Collaboration
Journal Material Science in Semiconductor Processing
Journal TypeAnother Country
Volume, Issue, Page 7,pp.289-292
Author and coauthor J. Yamanaka, K. Sawano, K. Nakagawa, K. Suzuki, Y. Ozawa, S. Koh, T. Hattori and Y. Shiraki