|
KOH Shinji
Department Aoyama Gakuin University Department of Electrical Engineering and Electronics, College of Science and Engineering Position Professor |
|
| Language | English |
| Publication Date | 2005/02 |
| Type | Academic Journal |
| Peer Review | Peer reviewed |
| Title | Changes in elastic deformation of strained Si by microfabrication |
| Contribution Type | Collaboration |
| Journal | Materials Science in Semiconductor Processing |
| Journal Type | Another Country |
| Volume, Issue, Page | 8,pp.181-185 |
| Author and coauthor | K. Arimoto, D. Furukawa, J. Yamanaka, K. Nakagawa, K. Sawano, S. Koh, Y. Shiraki and N. Usami |